Concepedia

Ayumi Sakurai

AS

Statistics

Publications

2

Citations

23

H-Index

2

Active since

2014

Affiliations

Yokohama National University(Current)

Ayumi Sakurai is an author at Yokohama National University specializing in applied physics, engineering, and surface science.

Top concepts

Publications per year

2014–2016

2

Publications

2

By-Product Formation in a Trichlorosilane-Hydrogen System for Silicon Film Deposition

Hitoshi Habuka, Ayumi Sakurai, Ayumi Saito · ECS Journal of Solid State Science and Technology · 2014 · 13 citations · Full text

, , +13

Increase in silicon film deposition rate in a SiHCl3-SiHx-H2 system

Ayumi Saito, Ayumi Sakurai, Hitoshi Habuka · Journal of Crystal Growth · 2016 · 10 citations

, , +8

1–2 of 2