Concepedia
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10
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Active since
2014
Affiliations
Sejong University(Current)
Si-Hong Kim is an author at Sejong University.
Publications per year
2014–2014
Filling performance and electrical characteristics of Al2O3 films deposited by atomic layer deposition for through-silicon via applications
Kyeong-Keun Choi, Jong Kee, Si-Hong Kim et al. · Thin Solid Films · 2014 · 10 citations
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