Concepedia

U. Sarbach

US

1

Publications

21

Citations

1

H-Index

1993

Active since

U. Sarbach is an author specializing in optoelectronics, micromachining, and laser technology.

Top concepts

PhotonicsEngineeringLaser OpticsLaser PhysicsExcimer LasersMicromachiningMicrostructureApplied PhysicsOptoelectronicsLaser Technology

Publications per year

1993–1993

1

Publications

1

<title>Excimer laser illumination and imaging optics for controlled microstructure generation</title>

Hans-Juergen Kahlert, U. Sarbach, B. Burghardt et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1993 · 21 citations

Excimer Laser Illumination, Engineering, Mechanical Engineering +22

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