Concepedia

Yoshitada Oshida

YO

2

Publications

67

Citations

2

H-Index

1972

Active since

Affiliations

Hitachi (Japan)(Current)

Yoshitada Oshida is an author at Hitachi (Japan) specializing in applied physics, engineering, and education.

Top concepts

EducationMetrologyMicroscopyCalibrationEngineeringMeasurementApplied PhysicsInstrumentationMicrofabricationOptical Metrology

Publications per year

1972–1994

2

Publications

2

Random Phase Shifters for Fourier Transformed Holograms

Yasutsugu Takeda, Yoshitada Oshida, Y. Miyamura · Applied Optics · 1972 · 57 citations

<title>Focusing and leveling based on wafer surface profile detection with interferometry for optical lithography</title>

Masahiro Watanabe, Yoshitada Oshida, Yasuhiko Nakayama et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 1994 · 10 citations

Engineering, Microscopy, Measurement +16

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