M. Ennahali

Publications

Citations

H-Index

2011

Active since

Affiliations

Laboratoire de Mécanique, Modélisation & Procédés Propres(Current)

M. Ennahali is an author at Laboratoire de Mécanique, Modélisation & Procédés Propres specializing in engineering, materials engineering, and chemical engineering.

Top concepts

EngineeringMicrostructureMaterial ScienceChemical EngineeringMaterials EngineeringMechanical EngineeringCorrosionRecyclingSoft MatterProcess Design

Publications per year

2011–2013

Publications

Static dissolution rate of tungsten film versus chemical adjustments of a reused slurry for chemical mechanical polishing

Clémence Coetsier, F. Testa, E. Carretier et al. · Applied Surface Science · 2011 · 20 citations

Materials Science, Materials Engineering, Chemical Engineering +12

Retreatment of silicon slurry by membrane processes

F. Testa, Clémence Coetsier, E. Carretier et al. · Journal of Hazardous Materials · 2011 · 19 citations

Engineering, Silicon Slurry, Microfabrication +5

Recycling a slurry for reuse in chemical mechanical planarization of tungsten wafer: Effect of chemical adjustments and comparison between static and dynamic experiments

F. Testa, Clémence Coetsier, E. Carretier et al. · Microelectronic Engineering · 2013 · 13 citations · Full text

Materials Engineering, Process Design, Chemical Engineering +13

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