Concepedia

Songtao Chang

SC

Statistics

Publications

4

Citations

63

H-Index

4

Active since

2022

Affiliations

Hefei University of Technology(Current)

Songtao Chang is an author at Hefei University of Technology specializing in laser spectroscopy, natural sciences, and surface science.

ORCID

Publications per year

2022–2024

4

Publications

4

Effects of sample surface morphology on laser-induced breakdown spectroscopy

Lei Yang, Yanhui Zhang, Zi Zhang et al. · Journal of Analytical Atomic Spectrometry · 2022 · 19 citations

, , +13

High-precision moiré alignment method using centrosymmetric grating for 3D interlayer interconnect

Feifan Xu, Songtao Chang, Yulu Zhao et al. · Optics and Lasers in Engineering · 2023 · 16 citations

, , +15

Dispersion lens for chromatic confocal spectral interferometry

Yulu Zhao, Songtao Chang, Weishi Li et al. · Optics and Lasers in Engineering · 2023 · 15 citations

, , +12

Enhancing accuracy of alignment measurement in lithography using two-dimensional desirable sidelobe convolution window

Feifan Xu, Songtao Chang, Jin Zhang et al. · Measurement · 2024 · 13 citations

, , +6

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