Concepedia
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Publications
1
Citations
24
H-Index
Active since
2010
Affiliations
University of Illinois Urbana-Champaign(Current)
K. J. Park is an author at University of Illinois Urbana-Champaign.
Publications per year
2010–2010
Flux and energy analysis of species in hollow cathode magnetron ionized physical vapor deposition of copper
Eunsuk Ko, A. Dulkin, K. J. Park et al. · Review of Scientific Instruments · 2010 · 24 citations
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