Concepedia
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Publications
1
Citations
11
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Active since
1996
Margot Mangerich is an author specializing in electron beam lithography, engineering, and plasma etching.
Publications per year
1996–1996
E-beam probe station with integrated tool for electron beam induced etching
D. Winkler, Hans Zimmermann, Margot Mangerich et al. · Microelectronic Engineering · 1996 · 11 citations
Engineering, Electrical Engineering, Instrumentation +9
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