Julian Pilz

Tuning of material properties of ZnO thin films grown by plasma-enhanced atomic layer deposition at room temperature

Julian Pilz, Alberto Perrotta, Paul Christian et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2017 · 47 citations · Full text

Engineering, Inorganic Thin Films, Chemical Deposition +16

Piezoelectric Properties of Zinc Oxide Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition

Taher Abu Ali, Julian Pilz, Philipp Schäffner et al. · physica status solidi (a) · 2020 · 45 citations · Full text

Materials Science, Engineering, Electronic Materials +11

ZnO Thin Films Grown by Plasma‐Enhanced Atomic Layer Deposition: Material Properties Within and Outside the “Atomic Layer Deposition Window”

Julian Pilz, Alberto Perrotta, G. Leising et al. · physica status solidi (a) · 2019 · 29 citations · Full text

Materials Science, Gpc Versus Temperature, Optical Materials +14

Opto-chemical control through thermal treatment of plasma enhanced atomic layer deposited ZnO: An in situ study

Alberto Perrotta, Julian Pilz, Antonella Milella et al. · Applied Surface Science · 2019 · 20 citations · Full text

Optical Materials, Engineering, Zno Layers +19

Raman Spectroscopy and Spectral Signatures of AlScN/Al2O3

Dmytro Solonenko, Agnė Žukauskaitė, Julian Pilz et al. · Micromachines · 2022 · 16 citations · Full text