D. Hambach

X-ray microscopy in Zernike phase contrast mode at 4 keV photon energy with 60 nm resolution

U Neuh usler, Gerd Schneider, Wolfgang Ludwig et al. · Journal of Physics D Applied Physics · 2003 · 73 citations · Full text

Engineering, Microscopy, Integrated Circuits +21

A slit grating spectrograph for quantitative soft x-ray spectroscopy

Thomas Wilhein, Stefan Rehbein, D. Hambach et al. · Review of Scientific Instruments · 1999 · 63 citations

Short Wavelength Optic, X-ray Spectroscopy, Engineering +17

Line width control using a defocused low voltage electron beam

Christian Dávid, D. Hambach · Microelectronic Engineering · 1999 · 58 citations

Electrical Engineering, Engineering, Electron Optic +1

Off-axis reflection zone plate for quantitative soft x-ray source characterization

Thomas Wilhein, D. Hambach, B. Niemann et al. · Applied Physics Letters · 1997 · 53 citations · Full text

X-ray Spectroscopy, Engineering, Microscopy +19

<i>In situ</i> x-ray microscopic observation of the electromigration in passivated Cu interconnects

Gerd Schneider, D. Hambach, B. Niemann et al. · Applied Physics Letters · 2001 · 44 citations

Materials Science, Electrical Engineering, Electromigration Technique +15