Statistics
Publications
3
Citations
48
H-Index
3
Active since
2007
Affiliations
Ulvac (Japan)(Current)
Yutaka Kokaze is an author at Ulvac (Japan) specializing in applied physics, materials engineering, and materials science.
Publications per year
2007–2013
3
3
Dry Etching Process for Pb(Zr,Ti)O<sub>3</sub> Thin-Film Actuators
Yutaka Kokaze, Isao Kimura, Mitsuhiro Endo et al. · Japanese Journal of Applied Physics · 2007 · 12 citations
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