Statistics
Publications
5
Citations
68
H-Index
5
Active since
2003
Affiliations
Simon Fraser University(Current)
Yuqiang Tu is an author at Simon Fraser University specializing in materials science, materials engineering, and thin film optical properties.
Publications per year
2003–2006
5
5
Creating direct-write gray-scale photomasks with bimetallic thin film thermal resists
Glenn H. Chapman, Yuqiang Tu, James M. Dykes et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 22 citations
Natural Sciences, Materials Engineering, Materials Science +12
Calibrating grayscale direct write bimetallic photomasks to create 3D photoresist structures
Yuqiang Tu, Glenn H. Chapman, James M. Dykes et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 15 citations
Natural Sciences, Materials Engineering, Materials Science +16
Laser-induced oxidation of metallic thin films as a method for creating grayscale photomasks
Glenn H. Chapman, Yuqiang Tu, Chinheng Choo et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2006 · 10 citations
Natural Sciences, Materials Engineering, Materials Science +17
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