Concepedia

Si-Lie Fu

SF

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Publications

3

Citations

48

H-Index

3

Active since

2006

Affiliations

South China Normal University(Current)

Si-Lie Fu is an author at South China Normal University specializing in engineering, applied physics, and electrical engineering.

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Publications per year

2006–2011

3

Publications

3

Characterizations of GaN film growth by ECR plasma chemical vapor deposition

Si-Lie Fu, Junfang Chen, Hongbin Zhang et al. · Journal of Crystal Growth · 2009 · 22 citations

, , +6

Study on the characteristics of ECR plasma spatial distribution

Si-Lie Fu, Junfang Chen, Shejun Hu et al. · Plasma Sources Science and Technology · 2006 · 15 citations

, , +15

Stress analyses of GaN film manufactured by ECR plasma-enhanced chemical vapor deposition

Si-Lie Fu, Junfang Chen, Peng Gao et al. · Vacuum · 2011 · 11 citations

, , +5

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