T. Boltshauser

High sensitivity CMOS humidity sensors with on-chip absolute capacitance measurement system

T. Boltshauser, C.A. Leme, H. Baltes · Sensors and Actuators B Chemical · 1993 · 51 citations

Electrical Engineering, Biomedical Sensors, Engineering +11

Capacitive humidity sensors in SACMOS technology with moisture absorbing photosensitive polyimide

T. Boltshauser, H. Baltes · Sensors and Actuators A Physical · 1991 · 44 citations

Sensor Technology, Electrical Engineering, Chemical Engineering +10

Humidity sensing properties and electrical permittivity of new photosensitive polyimides

T. Boltshauser, L. Sunil Chandran, H. Baltes et al. · Sensors and Actuators B Chemical · 1991 · 25 citations

Materials Science, Conducting Polymer, Electrical Engineering +9

Resonant humidity sensors using industrial CMOS-technology combined with postprocessing

T. Boltshauser, M Schonholzer, Oliver Brand et al. · Journal of Micromechanics and Microengineering · 1992 · 22 citations

Engineering, Low Cost Sensor, Humidity Sensor +16

A resonant poliyimide-based humidity sensor

Andreas Schroth, Karsten Sager, Gerald Gerlach et al. · Sensors and Actuators B Chemical · 1996 · 21 citations

Energy Harvesting, Engineering, Low Cost Sensor +4