Hirokazu Kaki

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Active since

2004

Affiliations

Japan Advanced Institute of Science and Technology(Current)

Hirokazu Kaki is an author at Japan Advanced Institute of Science and Technology specializing in materials science, silicon materials, and thin films.

Publications per year

2004–2007

Publications

Large-Area and High-Speed Deposition of Microcrystalline Silicon Film by Inductive Coupled Plasma using Internal Low-Inductance Antenna

Eiji Takahashi, Yasuaki Nishigami, Atsushi Tomyo et al. · Japanese Journal of Applied Physics · 2007 · 70 citations

Engineering, Electrical Engineering, Materials Science +17

Periodic grain-boundary formation in a poly-Si thin film crystallized by linearly polarized Nd:YAG pulse laser with an oblique incident angle

Hirokazu Kaki, Susumu Horita · Journal of Applied Physics · 2004 · 16 citations · Full text

Natural Sciences, Materials Science, Physics +17

Surface modification of an amorphous Si thin film crystallized by a linearly polarized Nd:YAG pulse laser beam

Susumu Horita, Hirokazu Kaki, Kensuke Nishioka · Journal of Applied Physics · 2007 · 13 citations · Full text

Engineering, Materials Engineering, Materials Science +17

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