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Publications
26
Citations
1
H-Index
2023
Active since
Affiliations
Zuowen Fan is an author at Shanghai Institute of Microsystem and Information Technology specializing in optoelectronics, electrical engineering, and integrated circuits.
Top concepts
PhysicsPhotonicsEngineeringApplied PhysicsOptoelectronicsMaterial ScienceMicroelectronicsOptical MaterialsSilicon PhotonicsIntegrated Circuits
Publications per year
2023–2023
1
1
Process Development of Low-Loss LPCVD Silicon Nitride Waveguides on 8-Inch Wafer
Zhaoyi Li, Zuowen Fan, Jingjie Zhou et al. · Applied Sciences · 2023 · 26 citations · Full text
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