Concepedia

Yu. A. Novikov

YA

Statistics

Publications

1

Citations

53

H-Index

1

Active since

2002

Affiliations

Research Institute of Molecular Electronics(Current)

Yu. A. Novikov is an author at Research Institute of Molecular Electronics specializing in form metrology, microelectronics, and microfabrication metrology.

Publications per year

2002–2002

1

Publications

1

Linear Standard for SEM–AFM Microelectronics Dimensional Metrology in the Range 0.01–100 μm

Ch. P. Volk, E. S. Gornev, Yu. A. Novikov et al. · Russian Microelectronics · 2002 · 53 citations

, , +16

1–1 of 1