Concepedia

Arthur Keigler

AK

2

Publications

30

Citations

2

H-Index

1983

Active since

Affiliations

Massachusetts Institute of Technology(Current)

Arthur Keigler is an author at Massachusetts Institute of Technology specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsElectrical EngineeringThin FilmsMicrofluidicsSemiconductorsSurface ScienceMaterial ScienceMicroelectronicsMicrofabrication

Publications per year

1983–2005

2

Publications

2

Diffusion Boundary Layer Studies in an Industrial Wafer Plating Cell

Bill Wu, Z. Liu, Arthur Keigler et al. · Journal of The Electrochemical Society · 2005 · 20 citations · Full text

Engineering, Chemical Deposition, Wafer Scale Processing +16

Electron-beam-induced current measurements in silicon-on-insulator films prepared by zone-melting recrystallization

E. W. Maby, Harry A. Atwater, Arthur Keigler et al. · Applied Physics Letters · 1983 · 10 citations · Full text

Semiconductors, Enhanced Diffusion, Electrical Engineering +15

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