Concepedia

M. Saga

MS

1

Publications

10

Citations

1

H-Index

1992

Active since

Affiliations

Fuji Electric (Japan)(Current)

M. Saga is an author at Fuji Electric (Japan) specializing in applied physics, electronic devices, and materials engineering.

Top concepts

Thin FilmsEngineeringApplied PhysicsNanoelectronicsSurface ScienceMaterial ScienceMicroelectronicsElectronic DevicesMaterials EngineeringElectrical Engineering

Publications per year

1992–1992

1

Publications

1

Characterization of Reactively Sputtered Silicon Nitride

K. Matsuzaki, Atsuo Hirabayashi, M. Saga · Journal of The Electrochemical Society · 1992 · 10 citations

Materials Science, Materials Engineering, Electrical Engineering +15

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