Swayambhu Behera

Oxygen radical and plasma damage of low-k organosilicate glass materials: Diffusion-controlled mechanism for carbon depletion

Mariana Goldman, David B. Graves, G. A. Antonelli et al. · Journal of Applied Physics · 2009 · 75 citations

Materials Science, Ftir Measurements, Low Interconnectedness +12

Fundamental mechanisms of oxygen plasma-induced damage of ultralow-k organosilicate materials: The role of thermal P3 atomic oxygen

Mrunalkumar Chaudhari, Jincheng Du, Swayambhu Behera et al. · Applied Physics Letters · 2009 · 48 citations

Materials Science, Ftir Analysis, Fourier Transform +13

Interaction of vacuum ultraviolet light with a low-k organosilicate glass film in the presence of NH3

Swayambhu Behera, Joe Lee, Sneha Gaddam et al. · Applied Physics Letters · 2010 · 19 citations

Engineering, Inorganic Photochemistry, Optical Glass +18

Photo-induced site-specific nitridation of plasma-deposited B10C2Hx films: A new pathway toward post-deposition doping of semiconducting boron carbides

Swayambhu Behera, Justin Wilks, P. A. Dowben et al. · Surface Science · 2010 · 17 citations

Materials Science, Photo-induced Site-specific Nitridation, Boron Nitride +7

He plasma pretreatment effects on oxygen plasma-induced carbon loss and surface roughening in an ultralow-k organosilicate glass film

Swayambhu Behera, Qing Wang, Jeffry A. Kelber · Journal of Physics D Applied Physics · 2011 · 15 citations

Engineering, Nanoporous Material, Glass Material +19