Concepedia

M. Esashi

ME

Statistics

Publications

4

Citations

46

H-Index

4

Active since

2002

Affiliations

Tohoku University(Current)

M. Esashi is an author at Tohoku University specializing in engineering, mechanical engineering, and microfabrication.

Top concepts

EngineeringMechanical EngineeringMaterial ScienceMicrofabricationMicrofluidicsApplied PhysicsInstrumentationMicroelectronicsElectrical EngineeringNanotubes

Publications per year

2002–2006

4

Publications

4

Design and fabrication of a pure-rotation microscanner with self-aligned electrostatic vertical combdrives in double SOI wafer

Yoshihiro MIZOGUCHI, M. Esashi · 2005 · 13 citations

Materials Science, Pure-rotation Microscanner, Double Soi Wafer +15

High aspect ratio spiral microcoils fabricated by a silicon lost molding technique

Yun Jiang, Takahito Ono, M. Esashi · Journal of Micromechanics and Microengineering · 2006 · 12 citations

Engineering, Mechanical Engineering, Biomedical Engineering +20

Nanomechanical structures with an integrated carbon nanotube

H. Miyashita, Takahito Ono, M. Esashi · 2004 · 11 citations

Engineering, Mechanical Engineering, Nanocomputing +17

Optical in situ monitoring of silicon diaphragm thickness during wet etching

Kazuyuki MINAMI, H. Tosaka, M. Esashi · 2002 · 10 citations

Optical Materials, Engineering, Optical Testing +16

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