V. Kanarov - Concepedia

Author

V. Kanarov

Also Known As

V. Kanarov, VYa Kanarov, Viktor Kanarov

Publications

116

Citations

H-Index

Concepts

All Affiliations

V. Kanarov is an author at Veeco (United States) specializing in engineering, applied physics, and ion beam physics.

#	Concept	H-Index	Publications	Citations
1	Engineering	5	5	97
2	Applied Physics	3	3	65
3	Electrical Engineering	3	3	44
4	Materials Science	3	3	64
5	Natural Sciences	1	1	11

V. Kanarov

Publications

Citations

H-Index

Page 1

	Year	Citations
Diamond-like carbon films deposited using a broad, uniform ion beam from an RF inductively coupled CH4-plasma source B. Druz, E. Ostan, Salvatore Distefano, Diamond and Related Materials Materials ScienceDiamond-like CarbonEngineeringCarbon-based MaterialNanomaterials	1998	32
Fifty centimeter ion beam sourcea) A. Hayes, V. Kanarov, B. Vidinsky Review of Scientific Instruments Electrical EngineeringIon ImplantationEngineeringPhysicsMicrofabrication	1996	22
Nitrogenated carbon films deposited using filtered cathodic arc B. Druz, Y. Yevtukhov, V. Novotný, Diamond and Related Materials Materials ScienceCarbon FilmsCarbonizationEngineeringPorous Carbon	2000	21
Thirty-five centimeter diameter radio frequency ion-beam source V. Kanarov, A. Hayes, R. Yevtukhov, Review of Scientific Instruments Materials ScienceElectrical EngineeringIon ImplantationEngineeringMicrofabrication	1998	11
High resolution energy analyzer for broad ion beam characterization V. Kanarov, D. Siegfried, P. Sferlazzo, Review of Scientific Instruments Electrical EngineeringEngineeringRfea DesignPhysicsMicroscopy	2008	11

Page 1