V. Kanarov

Diamond-like carbon films deposited using a broad, uniform ion beam from an RF inductively coupled CH4-plasma source

B. Druz, E. Ostan, Salvatore Distefano et al. · Diamond and Related Materials · 1998 · 32 citations

Materials Science, Diamond-like Carbon, Engineering +9

Fifty centimeter ion beam sourcea)

A. Hayes, V. Kanarov, B. Vidinsky · Review of Scientific Instruments · 1996 · 22 citations

Electrical Engineering, Ion Implantation, Engineering +15

Nitrogenated carbon films deposited using filtered cathodic arc

B. Druz, Y. Yevtukhov, V. Novotný et al. · Diamond and Related Materials · 2000 · 21 citations

Materials Science, Carbon Films, Carbonization +3

Thirty-five centimeter diameter radio frequency ion-beam source

V. Kanarov, A. Hayes, R. Yevtukhov et al. · Review of Scientific Instruments · 1998 · 11 citations

Materials Science, Electrical Engineering, Ion Implantation +14

High resolution energy analyzer for broad ion beam characterization

V. Kanarov, D. Siegfried, P. Sferlazzo et al. · Review of Scientific Instruments · 2008 · 11 citations

Electrical Engineering, Engineering, Rfea Design +13