Concepedia

Haruo Yokomichi

HY

Statistics

Publications

26

Citations

585

H-Index

15

Active since

1984

Affiliations

Toyama Prefectural University(Current)

The University of Tokyo

Japan Advanced Institute of Science and Technology

Kanazawa University

Hiroshima Institute of Technology

Haruo Yokomichi is an author at Toyama Prefectural University specializing in engineering, applied physics, and materials science.

Top concepts

Publications per year

1984–2005

26

Publications

26

Changes in structure and nature of defects by annealing of fluorinated amorphous carbon thin films with low dielectric constant

Haruo Yokomichi, Tohru Hayashi, Atsushi Masuda · Applied Physics Letters · 1998 · 56 citations

, , +11

Effect of sputtering with hydrogen dilution on fluorine concentration of low hydrogen content fluorinated amorphous carbon thin films with low dielectric constant

Haruo Yokomichi, Atsushi Masuda · Journal of Applied Physics · 1999 · 49 citations

, , +15

Electron-nuclear double resonance of dangling-bond centres associated with hydrogen incorporation in aSi:H

Haruo Yokomichi, Kazuo Morigaki · Solid State Communications · 1987 · 37 citations

Photo-Induced ESR in Amorphous Si<sub>1-x</sub>N<sub>x</sub>:H Films

Minoru Kumeda, Haruo Yokomichi, Tatsuo Shimizu · Japanese Journal of Applied Physics · 1984 · 36 citations

, , +18

Preparation of fluorinated amorphous carbon thin films

Haruo Yokomichi, Tohru Hayashi, Tomihiro Amano et al. · Journal of Non-Crystalline Solids · 1998 · 33 citations

, , +4

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