Statistics
Publications
4
Citations
170
H-Index
4
Active since
2004
Affiliations
Mitsubishi Heavy Industries (Japan)(Current)
Y. Yonekura is an author at Mitsubishi Heavy Industries (Japan) specializing in materials science, silicon materials, and semiconductor device materials.
Publications per year
2004–2006
4
4
Large area VHF plasma production using a ladder-shaped electrode
Hiroshi Mashima, Hideo Yamakoshi, Keisuke Kawamura et al. · Thin Solid Films · 2005 · 12 citations
1–4 of 4