S. C. Hsu

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Active since

1993

Affiliations

National Yang Ming Chiao Tung University(Current)

S. C. Hsu is an author at National Yang Ming Chiao Tung University specializing in materials science, semiconductor materials, and plasma-enhanced chemical vapor deposition.

Publications per year

1993–1994

Publications

Characteristics of low-temperature and low-energy plasma-enhanced chemical vapor deposited SiO2

S. W. Hsieh, C. Y. Chang, S. C. Hsu · Journal of Applied Physics · 1993 · 39 citations

Engineering, Materials Engineering, Materials Science +17

Properties of plasma-enhanced chemical-vapor-deposited <i>a</i>-SiN<i>x</i>:H by various dilution gases

S. W. Hsieh, C. Y. Chang, Y. S. Lee et al. · Journal of Applied Physics · 1994 · 30 citations

Natural Sciences, Materials Science, Physics +17

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