Concepedia

Y. Nagatake

YN

3

Publications

40

Citations

3

H-Index

1999

Active since

Affiliations

Nippon Steel (Japan)(Current)

Y. Nagatake is an author at Nippon Steel (Japan) specializing in engineering, electronic packaging, and materials engineering.

Top concepts

EngineeringMaterial ScienceMicroelectronicsElectronic PackagingMaterials EngineeringElectrical EngineeringApplied PhysicsNanoelectronicsMicrofabricationElectrical Insulation

Publications per year

1999–2003

3

Publications

3

Technological innovation in low-dose SIMOX wafers fabricated by an internal thermal oxidation (ITOX) process

Akira Matsumura, I. Hamaguchi, Keisuke Kawamura et al. · Microelectronic Engineering · 2003 · 17 citations

Materials Science, Materials Engineering, Electrical Engineering +12

Low-dose SIMOX wafers for LSIs fabricated with internal-thermal-oxidation (ITOX) process: electrical characterization

Akira Matsumura, Keisuke Kawamura, I. Hamaguchi et al. · Journal of Materials Science Materials in Electronics · 1999 · 12 citations

Analysis of Buried-Oxide Dielectric Breakdown Mechanism in Low-Dose Separation by Implanted Oxygen (SIMOX) Substrates Fabricated by Internal Thermal Oxidation (ITOX) Process

Keisuke Kawamura, TakayukiYano Hamaguchi, S. Takayama et al. · Japanese Journal of Applied Physics · 1999 · 11 citations

Engineering, Low-dose Separation, Implanted Oxygen +17

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