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Publications
1
Citations
42
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Active since
2005
M. Speil is an author specializing in multivariate process control, multivariate statistical fault detection, and engineering.
Publications per year
2005–2005
Fault Detection for a Via Etch Process Using Adaptive Multivariate Methods
Gerhard Spitzlsperger, Christian Schmidt, George W. Ernst et al. · IEEE Transactions on Semiconductor Manufacturing · 2005 · 42 citations
Engineering, Manufacturing Engineering, Manufacturing Systems +16
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