Concepedia

Takao Kaga

TK

4

Publications

170

Citations

4

H-Index

1983

Active since

Affiliations

Electrotechnical Institute(Current)

Takao Kaga is an author at Electrotechnical Institute specializing in engineering, applied physics, and electrical engineering.

Top concepts

EngineeringApplied PhysicsPhysicsOptoelectronicsMicroelectronicsElectrical EngineeringChemistrySurface ScienceNatural SciencesSpectroscopy

Publications per year

1983–1984

4

Publications

4

Glow-Discharge Deposition of a-Si: H from Pure Si<sub>2</sub>H<sub>6</sub> and Pure SiH<sub>4</sub>

Akihisa Matsuda, Takao Kaga, Hideo Tanaka et al. · Japanese Journal of Applied Physics · 1983 · 75 citations

Engineering, Glow Discharge, Chemistry +17

Lifetime of dominant radicals for the deposition of a-Si:H from SiH4 and Si2H6 glow discharges

Akihisa Matsuda, Takao Kaga, Hideo Tanaka et al. · Journal of Non-Crystalline Solids · 1983 · 46 citations

Ion Implantation, Engineering, Physics +12

Influence of Power-Source Frequency on the Properties of GD a-Si:H

Akihisa Matsuda, Takao Kaga, Hideo Tanaka et al. · Japanese Journal of Applied Physics · 1984 · 33 citations

Engineering, Glow Discharge, Silicon On Insulator +17

Glow-Discharge Deposition of Amorphous Silicon from SiH<sub>3</sub>F

Akihisa Matsuda, Kiyoshi Yagii, Takao Kaga et al. · Japanese Journal of Applied Physics · 1984 · 16 citations

Electrical Engineering, Engineering, Sih 3 +9

Rows per page

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