Concepedia

K.C. Sawswat

KS

Statistics

Publications

1

Citations

24

H-Index

1

Active since

1985

Affiliations

Stanford University(Current)

K.C. Sawswat is an author at Stanford University specializing in thin-film materials, semiconductor materials, and dry etching.

Publications per year

1985–1985

1

Publications

1

Layered and Homogeneous Films of Aluminum and Aluminum/Silicon with Titanium and Tungsten for Multilevel Interconnects

Donald S. Gardner, Timothy Michalka, K.C. Sawswat et al. · IEEE Journal of Solid-State Circuits · 1985 · 24 citations

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