E. Deckhardt is an author at Paul Scherrer Institute specializing in mechanical engineering, engineering, and microfabrication.
Top concepts
EngineeringMaterial ScienceMicroelectronicsMicrofabricationMechanical EngineeringNanomaterialsNanotechnologyApplied PhysicsNanofabricationElectronic Packaging
Publications per year
2004–2005
2
2
Controllable fabrication of SiGe/Si and SiGe/Si/Cr helical nanobelts
Li Zhang, E. Deckhardt, A Weber et al. · Nanotechnology · 2005 · 130 citations
Freestanding SiGe/Si/Cr and SiGe/Si/SixNy/Cr microtubes
S. V. Golod, V. Ya. Prinz, Philip Wägli et al. · Applied Physics Letters · 2004 · 74 citations · Full text
Rows per page
1–2 of 2