Concepedia

Erik Abegg

EA

1

Publications

16

Citations

1

H-Index

2016

Active since

Affiliations

ASML (Netherlands)(Current)

Erik Abegg is an author at ASML (Netherlands) specializing in thin films, microelectronics, and electrical engineering.

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Publications per year

2016–2016

1

Publications

1

Researching new EUV pellicle films for source powers beyond 250 watts

Maxim Nasalevich, Pieter Jan van Zwol, Erik Abegg et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2016 · 16 citations

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