Matthieu C. R. Leibovici

Pattern-integrated interference lithography: single-exposure fabrication of photonic-crystal structures

Guy M. Burrow, Matthieu C. R. Leibovici, Thomas K. Gaylord · Applied Optics · 2012 · 33 citations · Full text

Engineering, Manufacturing Engineering, Materials Science +16

Pattern-Integrated Interference Lithography: Prospects for Nano- and Microelectronics

Matthieu C. R. Leibovici, Guy M. Burrow, Thomas K. Gaylord · Optics Express · 2012 · 22 citations · Full text

Engineering, Electrical Engineering, Manufacturing Engineering +11

Pattern-integrated interference [Invited]

Thomas K. Gaylord, Matthieu C. R. Leibovici, Guy M. Burrow · Applied Optics · 2012 · 17 citations

Engineering, Electrical Engineering, Optics +16

Pattern-integrated interference lithography instrumentation

Guy M. Burrow, Matthieu C. R. Leibovici, Joseph W. Kummer et al. · Review of Scientific Instruments · 2012 · 16 citations · Full text

Engineering, Biomedical Engineering, Electrical Engineering +13

Photonic-crystal waveguide structure by pattern-integrated interference lithography

Matthieu C. R. Leibovici, Thomas K. Gaylord · Optics Letters · 2015 · 13 citations

Engineering, Electrical Engineering, Materials Science +16