Ken-ichi Hanaoka

Spectroscopic Study on a Discharge Plasma of MOCVD Source Gases for High-T_c Superconducting Films

Hiroshi Harima, Hiroshi Ohnishi, Ken-ichi Hanaoka et al. · Japanese Journal of Applied Physics · 1990 · 37 citations

Natural Sciences, Materials Science, Physics +17

In Situ Measurement of Gas-Phase Reactions in Metal-Organic Chemical Vapor Deposition of Copper Films by Fourier Transform Infrared Spectroscopy

Ken-ichi Hanaoka, Hiroshi Ohnishi, Kunihide Tachibana · Japanese Journal of Applied Physics · 1993 · 21 citations

Natural Sciences, Chemistry, Materials Science +13

An IR Study on the Stability of Y(DPM)₃, Ba(DPM)₂ and Cu(CPM)₂ for UV Irradiation

Hiroshi Harima, Hiroshi Ohnishi, Ken-ichi Hanaoka et al. · Japanese Journal of Applied Physics · 1991 · 20 citations

Natural Sciences, Chemistry, Materials Science +17

In-situ measurement of gas-phase reactions during the metal-organic chemical vapor deposition of copper using Fourier-transform infrared spectroscopy

Ken-ichi Hanaoka, Kunihide Tachibana, Hiroshi Ohnishi · Thin Solid Films · 1995 · 14 citations

Natural Sciences, Materials Engineering, Materials Science +16

In Situ Monitoring of Selective Copper Deposition Processes in a Metal-Organic Chemical Vapor Deposition Using Fourier-Transform Infrared Reflection-Absorption Spectroscopy

Ken-ichi Hanaoka, Hiroshi Ohnishi, Kunihide Tachibana · Japanese Journal of Applied Physics · 1995 · 11 citations

Natural Sciences, Materials Engineering, Materials Science +17