Statistics
Publications
1
Citations
12
H-Index
1
Active since
2015
Affiliations
KLA (United States)(Current)
Telly Koffas is an author at KLA (United States) specializing in overlay analysis, device modeling, and engineering.
Publications per year
2015–2015
1
1
Lithography overlay control improvement using patterned wafer geometry for sub-22nm technology nodes
Joel Peterson, Gary Rusk, Sathish Veeraraghavan et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2015 · 12 citations
Engineering, Manufacturing Engineering, Manufacturing Processes +13
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