5
Publications
85
Citations
5
H-Index
2017
Active since
Songwen Deng is an author at Chinese Academy of Sciences specializing in engineering, materials engineering, and materials science.
Top concepts
EngineeringChemistryThin FilmsSurface ScienceMaterial ScienceMaterials EngineeringOptical MaterialsChemical EngineeringHydrogenNanotechnology
Publications per year
2017–2022
5
5
Investigation on HfO2 properties grown by ALD using TDMAH as precursor
Yanrui Li, Songwen Deng, Jun‐Tao Li et al. · Vacuum · 2022 · 13 citations
Materials Science, Materials Engineering, Chemical Engineering +6
Rows per page
1–5 of 5