Concepedia

F.‐W. Breitbarth

FB

3

Publications

64

Citations

3

H-Index

1986

Active since

Affiliations

Friedrich Schiller University Jena(Current)

Schiller International University

F.‐W. Breitbarth is an author at Friedrich Schiller University Jena specializing in engineering, chemistry, and chemical engineering.

Top concepts

Publications per year

1986–1997

3

Publications

3

Investigation of the low-pressure plasma-chemical conversion of fluorocarbon waste gases

F.‐W. Breitbarth, Dorothea Berg, K. Dumke et al. · Plasma Chemistry and Plasma Processing · 1997 · 31 citations

, , +4

EPR investigation of plasma-chemical resist etching in O2 and O2/CF4 discharges

F.‐W. Breitbarth, E. Ducke, H.‐J. Tiller · Plasma Chemistry and Plasma Processing · 1990 · 20 citations

, , +8

Investigation of radical reactions in C2Cl4 and C2Cl4/O2 discharges by EPR, mass, and emission spectroscopy

F.‐W. Breitbarth, S. Rottmayer · Plasma Chemistry and Plasma Processing · 1986 · 13 citations

, , +10

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