Statistics
Publications
1
Citations
11
H-Index
1
Active since
2002
D. Schey is an author specializing in semiconductor devices, process stability, and dual damascene process.
Publications per year
2002–2002
1
1
Cu CMP with orbital technology: summary of the experience
Yehiel Gotkis, D. Schey, S. Alamgir et al. · 2002 · 11 citations
Engineering, Electrical Engineering, Materials Engineering +14
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