Statistics
Publications
2
Citations
152
H-Index
2
Active since
2008
Affiliations
Analog Devices (United States)(Current)
T. J. Frey is an author at Analog Devices (United States) specializing in microelectromechanical systems, materials science, and mems fabrication.
Publications per year
2008–2009
2
2
CMOS-compatible AlN piezoelectric micromachined ultrasonic transducers
Stefon E. Shelton, Mei-Lin Chan, Hyunkyu Park et al. · 2009 · 132 citations
Natural Sciences, Electrical Engineering, Materials Science +15
Clean and Conductive Wafer Bonding for MEMS
Chang-Han Yun, Jack Martin, Ling Chen et al. · ECS Transactions · 2008 · 20 citations
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