Statistics
Publications
1
Citations
23
H-Index
1
Active since
2007
Affiliations
Shaw-Yi Yen is an author at Industrial Technology Research Institute specializing in semiconductor devices, microfabrication, and clean room contamination control.
Publications per year
2007–2007
1
1
Case Study of Micro-Contamination Control
Shou-Nan Li, Hui-Ya Shih, Shaw-Yi Yen et al. · Aerosol and Air Quality Research · 2007 · 23 citations · Full text
Engineering, Chemical Engineering, Air Quality Management +16
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