Simulation of Berkovich nanoindentation experiments on thin films using finite element method

M. Lichinchi, Cristina Lenardi, J. Haupt, +1

Thin Solid Films

Materials ScienceMaterials EngineeringFinite Element MethodEngineeringMicrofabrication +8

Elastic constants and hardness of ion-beam-sputtered TiN<i>x</i> films measured by Brillouin scattering and depth-sensing indentation

Xin Jiang, M. Wang, K. Schmidt, +3

Journal of Applied Physics

Materials ScienceReactive-ion-beam SputteringSurface CharacterizationElastic ConstantsDepth-sensing Indentation +13

Titanium boron nitride coatings of very high hardness

Peter Hammer, Alexander Steiner, Raquel Vigil de la Villa, +4

Surface and Coatings Technology

Materials EngineeringMaterials ScienceBoron NitrideEngineeringHexagonal Boron Nitride +2

Effect of ion beam assistance on the microstructure of nonhydrogenated amorphous carbon

François Rossi, B. André, A. van Veen, +7

Journal of Applied Physics

EngineeringNonhydrogenated Amorphous CarbonThin Film Process TechnologyIon ImplantationCarbon-based Material +15

Nanostructured titanium boron nitride coatings of very high hardness

Timothy P. Mollart, Mark Baker, J. Haupt, +3

Surface and Coatings Technology

Materials ScienceBoron NitrideHigh HardnessHexagonal Boron Nitride

Ultrahard coatings from Ti-BN multilayers and by co-sputtering

T. Friesen, J. Haupt, W. Gissler, +2

Surface and Coatings Technology

Materials EngineeringMaterials ScienceUltrahard CoatingsEngineeringThermal Barrier Coating +3

Mixed phase nanocrystalline boron nitride films: Preparation and characterization

W. Gissler, J. Haupt, A. Hoffmann, +2

Thin Solid Films

Materials ScienceBoron NitrideEngineeringHexagonal Boron NitrideNanotechnology +2

Mechanical and thermophysical properties of diamond-like carbon (DLC) films with different ratios

F. Demichelis, Candido Fabrizio Pirri, Alberto Tagliaferro, +6

Diamond and Related Materials

Materials EngineeringMaterials ScienceDiamond-like CarbonEngineeringCarbon-based Material +9

Structural investigation of reactively sputtered boron nitride films

D.G. Rickerby, P.N. Gibson, W. Gissler, +1

Thin Solid Films

Materials ScienceBoron NitrideEngineeringHexagonal Boron NitrideApplied Physics +2

Auger electron spectroscopy/x-ray photoelectron spectroscopy study of Ti–B–N thin films

Mark Baker, Alexander Steiner, J. Haupt, +1

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films

EngineeringThin Film Process TechnologyChemical DepositionTi–b–n LayersStructural Materials +16