Statistics
Publications
20
Citations
729
H-Index
14
Active since
1974
R. S. Wagner is an author at Los Alamos National Laboratory specializing in engineering, physics, and applied physics.
Publications per year
1974–2020
20
20
Tungsten metallization for LSI applications
R. S. Wagner, A. K. Sinha, T. T. Sheng et al. · Journal of Vacuum Science and Technology · 1974 · 74 citations
Engineering, Tungsten Thin Films, Thin Film Process Technology +20
1–5 of 20