Concepedia

Sang-Rok Hah

SH

Statistics

Publications

4

Citations

59

H-Index

4

Active since

2001

Affiliations

Samsung (South Korea)(Current)

Sang-Rok Hah is an author at Samsung (South Korea) specializing in mechanical polishing, engineering, and surface science.

Publications per year

2001–2007

4

Publications

4

Effects of Nonionic Surfactants on Oxide-to-Polysilicon Selectivity during Chemical Mechanical Polishing

Jae-Dong Lee, Young-Rae Park, Bo Un Yoon et al. · Journal of The Electrochemical Society · 2002 · 22 citations

Natural Sciences, Chemical Engineering, Materials Science +17

Mechanisms of stress-induced voids in multi-level Cu interconnects

Byung-Lyul Park, Sang-Rok Hah, Chan-Geun Park et al. · 2003 · 14 citations

Engineering, Computer Engineering, Electrical Engineering +17

Effect of Polish By-Products on Copper Chemical Mechanical Polishing Behavior

Ja-Hyung Han, Sang-Rok Hah, Young-Jae Kang et al. · Journal of The Electrochemical Society · 2007 · 12 citations

Engineering, Materials Engineering, Materials Science +17

A Planarization Model in Chemical Mechanical Polishing of Silicon Oxide using High Selective CeO<sub>2</sub> Slurry

Jong Won Lee, Bo Un Yoon, Sang-Rok Hah et al. · MRS Proceedings · 2001 · 11 citations

Engineering, Materials Engineering, Materials Science +16

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