Z Liu

Publications

Citations

H-Index

1998

Active since

Affiliations

Laboratoire de Physique du Rayonnement et de la Lumière(Current)

Z Liu is an author at Laboratoire de Physique du Rayonnement et de la Lumière specializing in engineering, laser-surface interactions, and water treatment.

Top concepts

EngineeringMicrostructureApplied PhysicsSurface ScienceWater TreatmentMaterial ScienceMicrofabricationCrystalline DefectsMaterials EngineeringMechanical Engineering

Publications per year

1998–1999

Publications

Resist dissolution rate and inclined-wall structures in deep x-ray lithography

Z Liu, F. Bouamrane, Marc Roulliay et al. · Journal of Micromechanics and Microengineering · 1998 · 30 citations

Engineering, Electron-beam Lithography, Mechanical Engineering +16

Laser surface cleaning of organic contaminants

Yahui Feng, Z Liu, R. Vilar et al. · Applied Surface Science · 1999 · 23 citations

Engineering, Laser Photochemistry, Environmental Engineering +6

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