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Juergen Klein

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1

Publications

17

Citations

1

H-Index

2003

Active since

Affiliations

Fraunhofer Institute for Laser Technology(Current)

Juergen Klein is an author at Fraunhofer Institute for Laser Technology specializing in microelectronics, energy efficiency, and engineering.

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Publications per year

2003–2003

1

Publications

1

Physical properties of the HCT EUV source

Joseph Pankert, K. Bergmann, Juergen Klein et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2003 · 17 citations

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