Statistics
Publications
2
Citations
51
H-Index
2
Active since
2004
Affiliations
Intel (United States)(Current)
Michael Kovalchick is an author at Intel (United States) specializing in natural sciences, surface cleaning, and landfill gas emissions.
Publications per year
2004–2022
2
2
Improving photomask surface properties through a combination of dry and wet cleaning steps
Florence O. Eschbach, Daniel Tanzil, Michael Kovalchick et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2004 · 16 citations
Natural Sciences, Materials Engineering, Materials Science +13
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