Statistics
Publications
3
Citations
143
H-Index
3
Active since
2008
Affiliations
Hans Leichtfried is an author at Profactor (Austria) specializing in microfabrication, materials science, and extreme ultraviolet lithography.
Publications per year
2008–2020
3
3
UV-NIL with working stamps made from Ormostamp
M. Mühlberger, Iris Bergmair, Anna Klukowska et al. · Microelectronic Engineering · 2008 · 60 citations
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