Statistics
Publications
1
Citations
39
H-Index
1
Active since
1989
Affiliations
Toshiba (Japan)(Current)
Kazuyoshi Kashima is an author at Toshiba (Japan) specializing in materials engineering, silicon wafers, and surface microscopy.
Publications per year
1989–1989
1
1
Development of a bulk microdefect analyzer for Si wafers
Kazuo Moriya, Katsuyuki Hirai, Kazuyoshi Kashima et al. · Journal of Applied Physics · 1989 · 39 citations
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