M. Chen

Publications

161

Citations

H-Index

2001

Active since

Affiliations

Shanghai Institute of Microsystem and Information Technology(Current)

M. Chen is an author at Shanghai Institute of Microsystem and Information Technology specializing in engineering, applied physics, and optical properties.

Top concepts

Thin FilmsEngineeringApplied PhysicsSurface ScienceMaterial ScienceOptical MaterialsOptical PropertiesMaterials Engineering

Publications per year

2001–2001

Publications

Structural, electrical, and optical properties of transparent conductive oxide ZnO:Al films prepared by dc magnetron reactive sputtering

M. Chen, Z.L. Pei, X. Wang et al. · Journal of Vacuum Science & Technology A Vacuum Surfaces and Films · 2001 · 161 citations

Materials Science, Materials Engineering, Al Enrichment +14

Rows per page

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