Brendan O’Brien is an author at SUNY Polytechnic Institute specializing in surface science, applied physics, and engineering.
Top concepts
EngineeringApplied PhysicsSurface ScienceChemistryCorrosionOptoelectronicsMaterial ScienceCrystalline DefectsPhysicsThin Films
Publications per year
2012–2020
4
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Strategies for aggressive scaling of EUV multi-patterning to sub-20 nm features
Ashim Dutta, Jennifer Church, Joe Lee et al. · 2020 · 12 citations
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