Concepedia

Dah-Chung Owe-Yang

DO

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Publications

2

Citations

27

H-Index

2

Active since

2005

Affiliations

ShinEtsu Chemical (Japan)(Current)

Dah-Chung Owe-Yang is an author at ShinEtsu Chemical (Japan) specializing in instrumentation, computer engineering, and electronic packaging.

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Publications per year

2005–2008

2

Publications

2

Double exposure for the contact layer of the 65-nm node

Dah-Chung Owe-Yang, S.-S. Yu, Harrison Chen et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2005 · 17 citations

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Development of high-performance tri-layer material

Dah-Chung Owe-Yang, Toshiharu Yano, Ueda Takafumi et al. · Proceedings of SPIE, the International Society for Optical Engineering/Proceedings of SPIE · 2008 · 10 citations

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